The coating method for glass panel

专利摘要:
The present invention has a problem that the coating method of the glass substrate is in contact with the front surface of the glass substrate at a time, so that bubbles are generated inside the coating liquid during the liquid contact process so that defects such as streaks may occur on the coating surface. A first step of bringing the coating nozzle into close proximity to the bottom surface of the glass substrate and then contacting only one end portion first; Spreading the liquid contacted portion in the first step to the front surface of the glass substrate; Comprising the third step of coating the coating liquid on the lower surface of the glass substrate by moving the glass substrate when the liquid contact is completed on the front surface of the glass substrate, When the coating liquid is contacted to the glass substrate, a part of the liquid is first contacted, and then the coating proceeds in a state where the contact portion is diffused to the front surface so that coating defects such as streaks do not appear on the coating surface of the glass substrate. will be.
公开号:KR20040069486A
申请号:KR1020030005900
申请日:2003-01-29
公开日:2004-08-06
发明作者:윤승환；양남열；황재호；권순기；김종수
申请人:엘지전자 주식회사；
IPC主号:

专利说明:

Coating method for glass panel
[9] The present invention relates to a method and apparatus for coating a glass substrate to perform a more uniform coating when coating the glass substrate using a coating liquid, in particular, when the coating liquid of the coating nozzle is diffused after partial contact when contacting the glass substrate The present invention relates to a coating method and apparatus for a glass substrate to be coated to prevent coating defects.
[10] In general, in order to form a display device, the formation of a fine pattern is required, and in recent years, the formation of an extremely fine pattern is required according to the high definition of the display device. There are various methods for forming such an extremely fine pattern, and one of them is a method of transferring a master pattern by exposure.
[11] The master pattern is coated on the entire surface of the photoresist that optically reacts to the glass substrate on which chromium (Cr) sputtering is applied, and then a pattern is formed using a laser. The master pattern will be created. When the master pattern is made in this way, the master pattern is transferred to a portion to be actually applied using the master pattern to form a pattern.
[12] Currently, a photoresist is coated on a glass substrate by a spin coating method using centrifugal force and a capillary coating method using a capillary phenomenon. The spin coating method is suitable for small models because of the uniform coating, but has a disadvantage of being difficult to cope with large models. In addition, there is a disadvantage in that the outer side is thicker than the inner side during the coating, the coating thickness is difficult to less than 1000Å and the consumption of the coating liquid such as photoresist is not only high, but also has the disadvantage of leaving a circular pattern after coating.
[13] In contrast, the capillary coating method is easy to control the coating thickness and can cope with a large area, and can be coated even with a thin thickness of 500Å or less to meet the needs of the display industry, which is being enlarged and extremely fine patterned. It's a way.
[14] Accordingly, the coating process of the glass substrate according to the capillary coating method is shown in FIG. 1. That is, the coating liquid 24 ejected from the coating nozzle 21 positioned below the glass substrate 11 is coated on the lower portion of the glass substrate 11 while transferring the glass substrate 11 in a predetermined direction.
[15] The glass substrate 11 proceeds in a predetermined direction while the upper surface is fixed to and supported by the substrate holder 10 and through the coating nozzle 21 of the capillary coater 20 positioned below the glass substrate 11. The sprayed coating liquid 24 is coated on the lower surface of the glass substrate 11.
[16] Here, the capillary coater 20 is a coating bath 22 is filled with the coating liquid 24, and the opening 22 'of the coating bath 22 is located inside the coating bath 22 when coating A coating nozzle 21 which protrudes through the glass substrate 11 so that the tip is close to the glass substrate 11 and is sprayed into the opening of the tip through a capillary phenomenon to be coated on the lower surface of the glass substrate 11; It consists of the door 23 which opens and closes the opening part 22 'of the tank 22. As shown in FIG. In addition, the coating nozzle 21 has a width larger than that of the glass substrate 11, which is to allow the coating liquid 24 to be coated on the entire surface of the glass substrate 11 that runs in a predetermined direction. .
[17] The coating structure of a conventional glass substrate configured as described above is to be coated with the coating liquid on the lower surface of the glass substrate as the glass substrate proceeds.
[18] While the glass substrate 11 supported by the substrate holder 10 passes through the capillary coater 20, the coating nozzle 21 of the capillary coater 20 is formed on the lower surface of the glass substrate 11. 24) is coated. When the glass substrate 11 supported by the substrate holder 10 approaches the capillary coater 20, the coating nozzle 21 inside the coating bath 22 waits for the rising. When the door 23 of the coating bath 22 is opened, the coating nozzle 21 is raised through the opening 22 'of the coating bath 22, and the substrate holder 10 supporting the glass substrate 11 is coated. It moves in the direction of the opening 22 'of the tank 22. At this time, as the opening formed at the tip of the coating nozzle 21, the coating liquid 24 filled in the coating bath protrudes due to the capillary phenomenon and the cohesive force of the liquid.
[19] Therefore, the coating liquid 24 protruding through the opening of the coating nozzle 21 comes into contact with the moving glass substrate 11, and the coating nozzle 21 is lowered to an appropriate coating height. In this state, when the substrate holder 10 proceeds in the forward direction, the coating liquid 24 ejected through the opening of the coating nozzle 21 is coated on the lower surface of the glass substrate 11. Here, the ejection of the coating liquid through the opening of the coating nozzle 21 depends on the capillary phenomenon inside the coating nozzle 21 and the cohesive force of the liquid according to the surface tension of the coating liquid 24.
[20] When the glass substrate 11 is separated from the opening of the coating nozzle 21 according to the progress of the substrate holder 10, the coating nozzle 21 is lowered to be positioned inside the coating bath 22 and the coating bath 22. Door 23 is closed to seal the opening 22 'so that impurities do not flow into the coating tank 22. Of course, the coated glass substrate 11 of the coating liquid 24 prevents the coating portion from peeling through natural drying.
[21] Here, the first contact of the coating liquid 24 ejected through the opening of the coating nozzle 21 with the glass substrate 11 is referred to as a wet liquid. However, in the liquid contact process, a coating defect may occur in which the coating is not evenly applied to the entire surface of the glass substrate 11.
[22] That is, when the glass substrate 30 is actually coated, the stripes 36 often appear as shown in FIG. 2. Such stripes 36 are portions having a difference in thickness among the entire coating layer 35, and these stripes 36 cause fatal defects in forming a pattern using optics, and at the same time, deteriorate the value of a product. Thrown away.
[23] As such, the cause of the streaks 36 formed on the coating surface 35 of the glass substrate 30 is mostly caused by a fault in the liquid contacting process. That is, as shown in FIG. 3, when the bubble 46 is formed inside the coating solution 45 in the liquid contact process, the stripes 36 may be formed as shown in FIG. 3 along the portion where the bubble 46 is formed.
[24] In other words, the conventional coating method of the glass substrate is to be in contact with the front surface of the glass substrate at a time, there is a problem that bubbles are generated in the coating liquid during the liquid contact process to cause defects such as streaks on the coating surface.
[25] The present invention has been made in order to solve the above problems of the prior art, it is not in contact with the front surface of the glass substrate at the same time, but in contact with the first part of the liquid contact portion is then spread to the front surface of the glass substrate to the coating proceeds to the coating liquid It is an object of the present invention to provide a coating method of a glass substrate which prevents bubble generation in the inside so that defects such as streaks do not occur on the coated surface.
[1] 1 is a process chart showing a coating process of a typical glass substrate,
[2] 2 is a view showing a defect generated during the coating process,
[3] 3 is a front view of the defect of FIG. 2;
[4] Figure 4 is a process diagram showing a partial liquid contact process according to the coating method of the glass substrate according to the present invention,
[5] 5 is a partial perspective view showing the position of the trigger used in the present invention.
[6] <Explanation of symbols on main parts of the drawings>
[7] 50: glass substrate 55: coating liquid
[8] 60: coating nozzle 65: trigger
[26] The coating method of the glass substrate of the present invention for solving the above technical problem, the first step of first contacting only the one end portion after the coating nozzle in close proximity to the lower surface of the glass substrate; Spreading the liquid contacted portion in the first step to the front surface of the glass substrate; When the liquid contact is completed on the front surface of the glass substrate is characterized in that it comprises a third step of coating the coating liquid on the lower surface of the glass substrate by moving the glass substrate.
[27] Hereinafter, exemplary embodiments of the present invention will be described with reference to the accompanying drawings.
[28] The coating method of the glass substrate according to the present invention includes a first step of first contacting only one end portion after bringing the coating nozzle 60 close to the lower surface of the glass substrate 50 as shown in FIGS. 4 and 5; A second step of diffusing the liquid contacted in the first step to the entire surface of the glass substrate 50; Comprising a third step of coating the coating liquid on the lower surface of the glass substrate 50 by moving the glass substrate 50 when the liquid contact is completed on the front surface of the glass substrate 50.
[29] In the first step, the liquid contact is started at the corner portion of the glass substrate 50, and the liquid crystal is easily contacted with a portion of the right edge or the left edge, which is easy to work with, if necessary. Therefore, the contact liquid of the coating liquid 55 with respect to the glass substrate 50 advances with a directionality. In addition, in the second step, the wetted portion is diffused by using a capillary phenomenon between the tip of the glass substrate 50 and the coating nozzle 60.
[30] The third step includes adjusting the height of the coating nozzle 60 according to the coating thickness, and after the height adjustment of the coating nozzle 60 is completed, the glass substrate 50 is moved while the glass substrate 50 is moved. The coating solution 55 is coated on the lower surface.
[31] For the application of the coating method of the glass substrate of the present invention as shown in FIGS. 4 and 5 when the end portion is in contact with the glass substrate 50 and the coating nozzle 60 is located between the coating liquid 55 ), A trigger 65 is used for partial liquid contact.
[32] In the method of coating a glass substrate according to the present invention configured as described above, after the liquid contact is partially started on one side of the glass substrate, the coating is completed after the liquid contact is completed on the front surface of the glass substrate so that no bubbles remain in the coating liquid. Ensure that no coating defects appear on the effective surface of the substrate.
[33] When the glass substrate 50 is brought close to a coating bath (not shown) in order to coat the coating solution 55 on the lower surface of the glass substrate 50, the coating nozzle 60 inside the coating bath rises to raise the glass substrate 50. ) Is close to the tip. At this time, the coating liquid 55 is slightly out at the front end of the coating nozzle 60 due to the capillary phenomenon and the cohesive force of the liquid, so that the coating liquid 55 should not be in contact with the glass substrate 50.
[34] As described above, although the coating nozzle 60 is close to the lower surface of the glass substrate 50, the glass substrate 50 and the coating nozzle in the state in which the coating liquid 55 of the coating nozzle 60 does not touch the glass substrate 50. When the trigger 65 is inserted between the 60, the initial liquid contacting the glass substrate 50 for the first time is performed while the coating liquid 55 is pushed out by the trigger 65. At this time, when the coating solution is buried in the trigger 65, the initial contact liquid is very easy. Of course, the portion where the initial liquid contact is carried out is one side edge portion of the glass substrate 50, and only one side of the left edge or the right edge is selected according to the space in which the coating operation is performed.
[35] As described above, when a predetermined time elapses in a state where the initial contact liquid, ie partial contact liquid, is applied to one edge of the glass substrate 50, the coating liquid 55 may be formed by a capillary phenomenon between the glass substrate 50 and the coating nozzle 60. Since the diffusion, the liquid contact portion also extends to the front surface of the glass substrate 50.
[36] When the liquid contact with the front surface of the glass substrate 50 is completed through the above process to proceed the glass substrate 50 so that the coating liquid 55 is coated on the lower surface of the glass substrate 50, according to the required coating thickness By moving the coating nozzle 60 in the vertical direction, the glass substrate 50 and the coating nozzle 60 are separated by the required coating thickness. Here, when the distance between the glass substrate 50 and the coating nozzle 60 is reduced, of course, the coating liquid 55 is pushed by the coating nozzle 60 while the coating proceeds, but the coating thickness is large and the distance between the two. Even if is increased, the coating liquid 55 is not separated from the coating nozzle 60 by the liquid cohesion of the coating liquid 55, so that the coating is normally performed. When the distance control between the glass substrate 50 and the nozzle 60 according to the coating thickness is completed as described above, the glass substrate 50 is progressed and the coating liquid 55 is coated on the lower surface of the glass substrate 50.
[37] As described above, in the present invention, the coating nozzle 60 is raised to perform the liquid contact from one side edge of the glass substrate 50 using the trigger 65 just before the liquid contact with the glass substrate 50 is carried out. The liquid contact portion is allowed to diffuse to the entire surface of the glass substrate 50. Therefore, the liquid contact of the coating liquid 55 with respect to the glass substrate 50 proceeds with a directionality, and the liquid contact portion is diffused through the capillary phenomenon so that bubbles inside the coating liquid 55 generated in the conventional front liquid contact method are not generated. As a result, coating defects such as stripes do not appear on the coating surface of the glass substrate 50.
[38] However, some spots may be generated on the coated surface due to the influence of the trigger 65 on the part where the initial liquid is applied by the trigger 65, but in most cases, only the remaining parts except for the spot where the stain is used are used as effective parts. The quality of the coated glass substrate 50 is not significantly affected.
[39] As described above, in the coating method of the glass substrate of the present invention, when the coating liquid is brought into contact with the glass substrate, partial contact is first performed, and the coating proceeds in a state where the contact portion is diffused to the front, such that the coating surface of the glass substrate is coated with stripes. There is an advantage that the defect does not appear

权利要求:
Claims (1)
[1" claim-type="Currently amended] A first step of bringing the coating nozzle into close proximity to the bottom surface of the glass substrate and then contacting only one end portion first;
Spreading the liquid contacted portion in the first step to the front surface of the glass substrate;
And a third step of coating the coating liquid on the lower surface of the glass substrate by moving the glass substrate when the liquid contact is completed on the front surface of the glass substrate.

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同族专利:

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公开号 | 公开日

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KR100517607B1|2005-09-28|

引用文献:

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公开号 | 申请日 | 公开日 | 申请人 | 专利标题

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法律状态:
2003-01-29|Application filed by 엘지전자 주식회사

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2003-01-29|Priority to KR10-2003-0005900A

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2004-08-06|Publication of KR20040069486A

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2005-09-28|Application granted

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2005-09-28|Publication of KR100517607B1

优先权:

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申请号 | 申请日 | 专利标题

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KR10-2003-0005900A|KR100517607B1|2003-01-29|2003-01-29|The coating method for glass panel|